====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
--------------------------------------------------------------------
    Recoil/Damage Calculations made with Kinchin-Pease Estimates    
--------------------------------------------------------------------
----------------------------------------------------------------
  There are NO RECOILS unless a full TRIM calculation is made.   
----------------------------------------------------------------
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     2.E+05 A   Layer # 1- Density = 4.632E22 atoms/cm3 = .534 g/cm3
  Layer # 1- Li = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1001.00
 Ion Average Range =   107.3E+03 A   Straggling =   739.2E+01 A
 Ion Lateral Range =   542.3E+01 A   Straggling =   676.9E+01 A
 Ion Radial  Range =   859.1E+01 A   Straggling =   453.4E+01 A
====================================================================
 Range Skewne- = -002.3602  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 024.3342  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe       Recoil     
   (Ang.)       Ions     Distribution
-----------  ----------  ------------
150001.E-02  0.0000E+00  0.0000E+00
300001.E-02  0.0000E+00  0.0000E+00
450001.E-02  0.0000E+00  0.0000E+00
600001.E-02  0.0000E+00  0.0000E+00
750001.E-02  0.0000E+00  0.0000E+00
900001.E-02  0.0000E+00  0.0000E+00
105000.E-01  0.0000E+00  0.0000E+00
120000.E-01  0.0000E+00  0.0000E+00
135000.E-01  0.0000E+00  0.0000E+00
150000.E-01  0.0000E+00  0.0000E+00
165000.E-01  0.0000E+00  0.0000E+00
180000.E-01  6.6600E+01  0.0000E+00
195000.E-01  0.0000E+00  0.0000E+00
210000.E-01  0.0000E+00  0.0000E+00
225000.E-01  0.0000E+00  0.0000E+00
240000.E-01  0.0000E+00  0.0000E+00
255000.E-01  0.0000E+00  0.0000E+00
270000.E-01  0.0000E+00  0.0000E+00
285000.E-01  0.0000E+00  0.0000E+00
300000.E-01  0.0000E+00  0.0000E+00
315000.E-01  0.0000E+00  0.0000E+00
330000.E-01  0.0000E+00  0.0000E+00
345000.E-01  0.0000E+00  0.0000E+00
360000.E-01  0.0000E+00  0.0000E+00
375000.E-01  0.0000E+00  0.0000E+00
390000.E-01  0.0000E+00  0.0000E+00
405000.E-01  0.0000E+00  0.0000E+00
420000.E-01  0.0000E+00  0.0000E+00
435000.E-01  0.0000E+00  0.0000E+00
450000.E-01  0.0000E+00  0.0000E+00
465000.E-01  0.0000E+00  0.0000E+00
480000.E-01  0.0000E+00  0.0000E+00
495000.E-01  0.0000E+00  0.0000E+00
510000.E-01  0.0000E+00  0.0000E+00
525000.E-01  0.0000E+00  0.0000E+00
540000.E-01  0.0000E+00  0.0000E+00
555000.E-01  0.0000E+00  0.0000E+00
570000.E-01  0.0000E+00  0.0000E+00
585000.E-01  0.0000E+00  0.0000E+00
600000.E-01  0.0000E+00  0.0000E+00
615000.E-01  0.0000E+00  0.0000E+00
630000.E-01  0.0000E+00  0.0000E+00
645000.E-01  0.0000E+00  0.0000E+00
660000.E-01  0.0000E+00  0.0000E+00
675000.E-01  0.0000E+00  0.0000E+00
690000.E-01  0.0000E+00  0.0000E+00
705000.E-01  0.0000E+00  0.0000E+00
720000.E-01  0.0000E+00  0.0000E+00
735000.E-01  0.0000E+00  0.0000E+00
750000.E-01  0.0000E+00  0.0000E+00
765000.E-01  0.0000E+00  0.0000E+00
780000.E-01  0.0000E+00  0.0000E+00
795000.E-01  6.6600E+01  0.0000E+00
810000.E-01  6.6600E+01  0.0000E+00
825000.E-01  1.3320E+02  0.0000E+00
840000.E-01  6.6600E+01  0.0000E+00
855000.E-01  6.6600E+01  0.0000E+00
870000.E-01  2.6640E+02  0.0000E+00
885000.E-01  3.9960E+02  0.0000E+00
900000.E-01  1.3320E+02  0.0000E+00
915000.E-01  5.9940E+02  0.0000E+00
930000.E-01  3.9960E+02  0.0000E+00
945000.E-01  1.2654E+03  0.0000E+00
960000.E-01  6.6600E+02  0.0000E+00
975000.E-01  1.8648E+03  0.0000E+00
990000.E-01  1.3320E+03  0.0000E+00
100500.E+00  1.9314E+03  0.0000E+00
102000.E+00  3.1968E+03  0.0000E+00
103500.E+00  3.9960E+03  0.0000E+00
105000.E+00  5.1948E+03  0.0000E+00
106500.E+00  5.1282E+03  0.0000E+00
108000.E+00  4.8618E+03  0.0000E+00
109500.E+00  6.8598E+03  0.0000E+00
111000.E+00  6.6600E+03  0.0000E+00
112500.E+00  6.9264E+03  0.0000E+00
114000.E+00  4.3290E+03  0.0000E+00
115500.E+00  3.5298E+03  0.0000E+00
117000.E+00  3.1302E+03  0.0000E+00
118500.E+00  1.9980E+03  0.0000E+00
120000.E+00  9.9900E+02  0.0000E+00
121500.E+00  3.3300E+02  0.0000E+00
123000.E+00  1.9980E+02  0.0000E+00
124500.E+00  0.0000E+00  0.0000E+00
126000.E+00  0.0000E+00  0.0000E+00
127500.E+00  0.0000E+00  0.0000E+00
129000.E+00  0.0000E+00  0.0000E+00
130500.E+00  0.0000E+00  0.0000E+00
132000.E+00  0.0000E+00  0.0000E+00
133500.E+00  0.0000E+00  0.0000E+00
135000.E+00  0.0000E+00  0.0000E+00
136500.E+00  0.0000E+00  0.0000E+00
138000.E+00  0.0000E+00  0.0000E+00
139500.E+00  0.0000E+00  0.0000E+00
141000.E+00  0.0000E+00  0.0000E+00
142500.E+00  0.0000E+00  0.0000E+00
144000.E+00  0.0000E+00  0.0000E+00
145500.E+00  0.0000E+00  0.0000E+00
147000.E+00  0.0000E+00  0.0000E+00
148500.E+00  0.0000E+00  0.0000E+00
150000.E+00  0.0000E+00  0.0000E+00
